Title:
【発明の名称】縦形炉
Document Type and Number:
Japanese Patent JP2537536
Kind Code:
B2
Inventors:
WATANABE SHINGO
Application Number:
JP4226188A
Publication Date:
September 25, 1996
Filing Date:
February 26, 1988
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/22; H01L21/205; H01L21/31; (IPC1-7): H01L21/22; H01L21/205; H01L21/31
Domestic Patent References:
| JP57132441U | ||||
| JP4427951B1 |
Attorney, Agent or Firm:
Takehiko Suzue