Title:
【考案の名称】クライオポンプ
Document Type and Number:
Japanese Patent JP2538438
Kind Code:
Y2
Inventors:
Tatsuharu Ikegami
Application Number:
JP9293491U
Publication Date:
June 18, 1997
Filing Date:
November 13, 1991
Export Citation:
Assignee:
Osaka Vacuum Equipment Co., Ltd.
International Classes:
F04B37/08; (IPC1-7): F04B37/08
Attorney, Agent or Firm:
Fujimoto Noboru