Title:
【考案の名称】IC試験装置
Document Type and Number:
Japanese Patent JP2541903
Kind Code:
Y2
Inventors:
Nobuyuki Chiba
Application Number:
JP10574290U
Publication Date:
July 23, 1997
Filing Date:
October 08, 1990
Export Citation:
Assignee:
Advantest Corporation
International Classes:
G01R31/26; G01R31/00; G01R31/28; G01R31/30; H01L21/66; (IPC1-7): G01R31/26
Domestic Patent References:
| JP63132368U |
Attorney, Agent or Firm:
Kusano Takashi