Title:
【発明の名称】電界効果トランジスタの製造方法
Document Type and Number:
Japanese Patent JP2544767
Kind Code:
B2
Inventors:
SHIKADA SHINICHI
Application Number:
JP2725288A
Publication Date:
October 16, 1996
Filing Date:
February 08, 1988
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
H01L29/812; H01L21/338; H01L29/80; (IPC1-7): H01L21/338; H01L29/812
Domestic Patent References:
| JP6195570A | ||||
| JP629676A | ||||
| JP6072274A | ||||
| JP6315426A | ||||
| JP62277750A | ||||
| JP61152080A | ||||
| JP62185377A |
Attorney, Agent or Firm:
Kenichiro Sano (2 outside)