Title:
【発明の名称】ウェーハの連続処理装置及び連続処理方法
Document Type and Number:
Japanese Patent JP2546027
Kind Code:
B2
Inventors:
KIRISAKO TADASHI
Application Number:
JP10605990A
Publication Date:
October 23, 1996
Filing Date:
April 20, 1990
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/677; H01L21/68; (IPC1-7): H01L21/68
Domestic Patent References:
| JPS63229836A | ||||
| JPS5527367A |
Attorney, Agent or Firm:
Teiichi