Title:
【発明の名称】加筆修正液
Document Type and Number:
Japanese Patent JP2554910
Kind Code:
B2
More Like This:
JP2008541175 | Method of forming a photoresist element |
JPS62113141 | PHOTOLITHOGRAPHIC METHOD |
JP2004240423 | SHAPE FORMING METHOD FOR NONPHOTOIMAGE PROCESSABLE MATERIAL |
Inventors:
KOMANO HIROSHI
TAKAGI YOICHI
TAKAGI YOICHI
Application Number:
JP2891088A
Publication Date:
November 20, 1996
Filing Date:
February 12, 1988
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
G03F7/40; G03C11/00; G03F7/00; G03F7/26; (IPC1-7): G03F7/40
Domestic Patent References:
JP55140845A | ||||
JP55140846A |
Attorney, Agent or Firm:
Masao Isaka (1 person outside)