Title:
【発明の名称】有機薄膜の製造方法及び製膜装置
Document Type and Number:
Japanese Patent JP2558839
Kind Code:
B2
Abstract:
A film manufacturing apparatus includes a trough (12) storing a liquid (16) therein. The liquid surface of the liquid (16) forms a developing region (18) in which a monomolecular film of organic molecules is developed. The developed monomolecular film is compressed by a barrier (26) to a predetermined surface pressure. A work having a build-up surface (24a) is moved by a vertical moving mechanism (46) in a direction perpendicular to the developing region through the monomolecular film while being moved ahead of the build-up surface in a horizontal direction by a horizontal moving mechanism (42), so that the monomolecular film is built up on the build-up surface.
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Inventors:
EKUSA TAKASHI
MIURA AKIRA
MOTOMA NOBUHIRO
MIURA AKIRA
MOTOMA NOBUHIRO
Application Number:
JP23530188A
Publication Date:
November 27, 1996
Filing Date:
September 20, 1988
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
B05C3/02; B05D1/20; (IPC1-7): B05D1/20; B05C3/02
Domestic Patent References:
| JP6354933A | ||||
| JP61283377A |
Attorney, Agent or Firm:
Takehiko Suzue (2 outside)