Title:
【発明の名称】半導体圧力センサ
Document Type and Number:
Japanese Patent JP2570712
Kind Code:
B2
Inventors:
FUJII TETSUO
AZEYANAGI SUSUMU
AZEYANAGI SUSUMU
Application Number:
JP30229986A
Publication Date:
January 16, 1997
Filing Date:
December 18, 1986
Export Citation:
Assignee:
DENSOO KK
International Classes:
H01L29/84; G01L9/00; G01L9/04; (IPC1-7): H01L29/84; G01L9/04
Domestic Patent References:
| JP55162272A |
Attorney, Agent or Firm:
Hirohiko Usui (1 outside)