【考案の名称】縦型CVD・拡散装置

Title:

【考案の名称】縦型CVD・拡散装置

Document Type and Number:

Japanese Patent JP2570756

Kind Code:

Y2

Inventors:

Kano Riichi
Shoichiro Izumi
Yasuhiro Harada
Tojizuka Koji

Application Number:

JP1723788U

Publication Date:

May 13, 1998

Filing Date:

February 12, 1988

Export Citation:

Assignee:

Kokusai Electric Co., Ltd.

International Classes:

H01L21/22; C23C16/44; C23C16/46; C23C16/52; H01L21/205; (IPC1-7): H01L21/22; C23C16/44; C23C16/46; C23C16/52; H01L21/205

Domestic Patent References:

JP6324615A
JP52139378A

Attorney, Agent or Firm:

Ishido

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