Title:
【発明の名称】放射高感度性デバイスの改良
Document Type and Number:
Japanese Patent JP2573274
Kind Code:
B2
Abstract:
A radiation sensitive device comprising a substrate carrying a radiation sensitive layer is coated with a discontinuous covering layer which is more light sensitive than the radiation sensitive layer. The covering layer is formed by spraying and assists in improving vacuum drawdown during image-wise exposure of the device without having a deleterious affect on the exposure and development characteristics of the device.
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Inventors:
KUUPAA GURAHAMU FUIRITSUPU
Application Number:
JP50004986A
Publication Date:
January 22, 1997
Filing Date:
December 05, 1986
Export Citation:
Assignee:
II AI DEYUHON DE NIMOASU ANDO CO
International Classes:
G03C1/00; G03F7/00; G03F7/022; G03F7/023; G03F7/027; G03C1/72; G03F7/038; G03F7/095; G03F7/115; G03F7/26; (IPC1-7): G03F7/26; G03F7/00; G03F7/023; G03F7/027; G03F7/038
Domestic Patent References:
| JP5811943A | ||||
| JP58205154A | ||||
| JP5997137A | ||||
| JP6169130A |
Attorney, Agent or Firm:
Akihide Sugimura (1 outside)