Title:
【発明の名称】ダイボンダ
Document Type and Number:
Japanese Patent JP2573276
Kind Code:
B2
Inventors:
NAGABUCHI TATSUHIKO
Application Number:
JP33488A
Publication Date:
January 22, 1997
Filing Date:
January 06, 1988
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01L21/52; (IPC1-7): H01L21/52
Domestic Patent References:
| JPS6136941A | ||||
| JPS6158244A | ||||
| JPS6139528A |
Attorney, Agent or Firm:
Norio Ogo