Title:
【発明の名称】熱処理用反応管の製造方法
Document Type and Number:
Japanese Patent JP2577568
Kind Code:
B2
Inventors:
MATSUO HIDEYASU
ENDO KOICHI
SASAKI YASUMI
ENDO KOICHI
SASAKI YASUMI
Application Number:
JP20354587A
Publication Date:
February 05, 1997
Filing Date:
August 18, 1987
Export Citation:
Assignee:
TOSHIBA CERAMICS CO
International Classes:
B01J19/24; B01J19/00; C03B19/00; C03B23/04; C03B23/047; C03B23/207; C03B37/026; H01L21/22; (IPC1-7): H01L21/22; B01J19/00
Domestic Patent References:
| JP62193644A | ||||
| JP52145771U |
Attorney, Agent or Firm:
Toru Tanabe