Title:
【発明の名称】ウエーハの枚葉化装置
Document Type and Number:
Japanese Patent JP2580212
Kind Code:
B2
Inventors:
RIKIHISA YASUHIRO
OGAKURA KAZUJI
OGAKURA KAZUJI
Application Number:
JP29549487A
Publication Date:
February 12, 1997
Filing Date:
November 24, 1987
Export Citation:
Assignee:
SUMITOMO SHICHITSUKUSU KK
International Classes:
B65H3/08; B65H3/56; H01L21/677; H01L21/68; (IPC1-7): B65H3/56; B65H3/08; H01L21/68
Domestic Patent References:
| JP597645A | ||||
| JP6360832A | ||||
| JP63267631A | ||||
| JP62179246U | ||||
| JP5586036U | ||||
| JP6426648U |
Attorney, Agent or Firm:
Mori Masazumi