Title:
【発明の名称】投影露光装置
Document Type and Number:
Japanese Patent JP2580572
Kind Code:
B2
Inventors:
TANIMOTO SHOICHI
Application Number:
JP19737386A
Publication Date:
February 12, 1997
Filing Date:
August 25, 1986
Export Citation:
Assignee:
NIPPON KOGAKU KK
International Classes:
G01B11/00; G03F7/22; G03F9/00; G05D3/12; H01L21/027; H01L21/30; H01L21/68; (IPC1-7): H01L21/027; G03F7/22
Domestic Patent References:
| JP59214225A | ||||
| JP6021051A | ||||
| JP61168919A | ||||
| JP59141226A | ||||
| JP618922A | ||||
| JP6119129A | ||||
| JP61177722A |
Attorney, Agent or Firm:
Masatoshi Sato