Title:
【発明の名称】電子線装置における開き角制御装置
Document Type and Number:
Japanese Patent JP2582138
Kind Code:
B2
Inventors:
MATSUTANI MYUKI
SAITO MASAKI
SAITO MASAKI
Application Number:
JP25344988A
Publication Date:
February 19, 1997
Filing Date:
October 07, 1988
Export Citation:
Assignee:
NIPPON ELECTRON OPTICS LAB
International Classes:
H01J37/141; H01J37/21; (IPC1-7): H01J37/141; H01J37/21
Domestic Patent References:
| JP61208736A | ||||
| JP5981849A | ||||
| JP59108250A | ||||
| JP5610740B2 |