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Title:
【発明の名称】ウェーハの接着方法
Document Type and Number:
Japanese Patent JP2583559
Kind Code:
B2
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Inventors:
TSURUTA SHOJI
SAEKI KAZUNORI
Application Number:
JP5313788A
Publication Date:
February 19, 1997
Filing Date:
March 07, 1988
Export Citation:
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Assignee:
MITSUBISHI MATERIARU KK
MITSUBISHI MATERIARU SHIRIKON KK
International Classes:
H01L21/304; B23Q3/08; B24B37/30; C09J5/00; (IPC1-7): B23Q3/08; B24B37/04; H01L21/304
Domestic Patent References:
JP1216540A
JP5917159U
JP5936245U
Attorney, Agent or Firm:
Masatake Shiga (1 person outside)



 
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