Title:
【考案の名称】走査装置
Document Type and Number:
Japanese Patent JP2586158
Kind Code:
Y2
Inventors:
Tsuzuki sharp
Application Number:
JP8168192U
Publication Date:
December 02, 1998
Filing Date:
October 30, 1992
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
G01N27/82; G01N29/04; G01N29/26; (IPC1-7): G01N29/26; G01N27/82; G01N29/10
Domestic Patent References:
| JP5331095A | ||||
| JP6450956A | ||||
| JP3204368A |
Attorney, Agent or Firm:
Yoshihiko Iinuma