Title:
【考案の名称】輸送用ウェーハケース
Document Type and Number:
Japanese Patent JP2586364
Kind Code:
Y2
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Inventors:
Hiroshi Tsuburada
Application Number:
JP9354392U
Publication Date:
December 02, 1998
Filing Date:
December 28, 1992
Export Citation:
Assignee:
Sumitomo Sitix Co., Ltd.
International Classes:
B65D85/38; H01L21/673; H01L21/68; (IPC1-7): H01L21/68; B65D85/38
Domestic Patent References:
| JP4303941A |
Attorney, Agent or Firm:
Yoshihisa Oshida