Title:
【発明の名称】パタ-ン形成方法
Document Type and Number:
Japanese Patent JP2588192
Kind Code:
B2
Inventors:
KUMAGAI AKITOSHI
NIKI HIROICHI
NIKI HIROICHI
Application Number:
JP10458587A
Publication Date:
March 05, 1997
Filing Date:
April 30, 1987
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01L21/30; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP61179535A |
Attorney, Agent or Firm:
Hideaki Tokawa (1 outside)