Title:
【発明の名称】ガス流量制御装置
Document Type and Number:
Japanese Patent JP2590952
Kind Code:
B2
Inventors:
KAWAGUCHI YOJI
TSUMOTO YASUKATSU
HARA MASAO
FURUYA TOSHUKI
TSUMOTO YASUKATSU
HARA MASAO
FURUYA TOSHUKI
Application Number:
JP27617187A
Publication Date:
March 19, 1997
Filing Date:
October 30, 1987
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
F24C3/06; F16K1/52; F16K11/04; F23N1/00; F23N5/26; F24C3/12; (IPC1-7): F23N1/00; F16K11/04
Domestic Patent References:
| JP57122219A | ||||
| JP6169643U | ||||
| JP5211242U | ||||
| JP6030523Y2 |
Attorney, Agent or Firm:
Tomoyuki Takimoto (1 person outside)