Title:
【考案の名称】レーザとその出力パワー検出器とを備えた装置
Document Type and Number:
Japanese Patent JP2591522
Kind Code:
Y2
Abstract:
Apparatus for detection of laser output on a semiconductor wafer, wherein the laser and detector can be formed by similar or simultaneous processes on the same semiconductor substrate. More particularly, a laser cavity and a detection cavity (13, 19) are formed on a semiconductor wafer (11) in parallel, such that light emitted laterally from the laser cavity is detected by the detection cavity. The amount of light detected can then be transformed into data, which in turn can be used to control the output of the laser. Advantages of the present invention include the ability to simultaneously form the laser and detector portions. The detector portion does not interfere with the beam being provided by the laser, and multiple laser-sensor pairs can be integrated on a single semiconductor substrate.
Inventors:
Thomas El Paoli
G A Neville Connell
Donald Earl Siefres
Robert Elthornton
G A Neville Connell
Donald Earl Siefres
Robert Elthornton
Application Number:
JP936897U
Publication Date:
March 03, 1999
Filing Date:
October 23, 1997
Export Citation:
Assignee:
XEROX CORPORATION
International Classes:
H01L27/15; H01S5/00; H01S5/026; H01S5/042; H01S5/06; H01S5/0683; H01S5/40; (IPC1-7): H01S3/18
Domestic Patent References:
| JP61154090A | ||||
| JP6318685A | ||||
| JP63310193A | ||||
| JP62272578A | ||||
| JP6281784A | ||||
| JP61100165U | ||||
| JP5549586U |
Attorney, Agent or Firm:
Minoru Nakamura (6 outside)