Title:
【考案の名称】薄膜製造装置
Document Type and Number:
Japanese Patent JP2601132
Kind Code:
Y2
Inventors:
Shinichi Miyahara
Takeda Victory
Takeda Victory
Application Number:
JP6299193U
Publication Date:
November 08, 1999
Filing Date:
October 30, 1993
Export Citation:
Assignee:
Sanyo Electric Co., Ltd.
International Classes:
H01L21/205; H01L31/04; (IPC1-7): H01L21/205; H01L31/04
Attorney, Agent or Firm:
Ryutaro Fujita
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