Title:
【発明の名称】気相成長装置
Document Type and Number:
Japanese Patent JP2602298
Kind Code:
B2
Inventors:
Yasuo Ikeda
Application Number:
JP23700888A
Publication Date:
April 23, 1997
Filing Date:
September 20, 1988
Export Citation:
Assignee:
NEC
International Classes:
C23C16/44; C23C16/448; C23C16/46; C23C16/52; H01L21/31; (IPC1-7): C23C16/44; C23C16/46; H01L21/31
Domestic Patent References:
| JP61276328A | ||||
| JP60211072A | ||||
| JP59103772U |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)