Title:
【発明の名称】GaAs集積回路の製造方法
Document Type and Number:
Japanese Patent JP2609632
Kind Code:
B2
Inventors:
Mochizuki Masao
Application Number:
JP24406087A
Publication Date:
May 14, 1997
Filing Date:
September 30, 1987
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/265; H01L21/027; H01L21/30; H01L21/68; H01L27/095; H01L29/80; (IPC1-7): H01L21/027; H01L21/265; H01L21/68
Domestic Patent References:
| JP568822A |
Attorney, Agent or Firm:
Hideaki Tokawa (1 outside)