Title:
【発明の名称】露光装置
Document Type and Number:
Japanese Patent JP2610647
Kind Code:
B2
Inventors:
Masahiro Yamakawa
Application Number:
JP12066488A
Publication Date:
May 14, 1997
Filing Date:
May 19, 1988
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01L21/30; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP622617A | ||||
| JP55143034A |
Attorney, Agent or Firm:
Tadahiko Ito