Title:
【発明の名称】半導体露光装置
Document Type and Number:
Japanese Patent JP2611760
Kind Code:
B2
Inventors:
Makoto Yoshida
Hamasaki Fumiei
Hamasaki Fumiei
Application Number:
JP21274886A
Publication Date:
May 21, 1997
Filing Date:
September 11, 1986
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/30; G03F7/20; H01L21/027; (IPC1-7): H01L21/027
Domestic Patent References:
| JP55129333A | ||||
| JP55132039A | ||||
| JP55165629A | ||||
| JP5783032A | ||||
| JP57183032A |
Attorney, Agent or Firm:
Tatsuo Ito (1 outside)