Title:
【発明の名称】レジスト処理装置およびレジスト処理方法
Document Type and Number:
Japanese Patent JP2615179
Kind Code:
B2
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Inventors:
Haruo Iwazu
Application Number:
JP1060889A
Publication Date:
May 28, 1997
Filing Date:
January 19, 1989
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; G03F7/20; H01L21/30; H01L21/683; (IPC1-7): H01L21/027; H01L21/68
Attorney, Agent or Firm:
Hajime Inoue (2 outside)