Title:
【発明の名称】単結晶引上げ装置
Document Type and Number:
Japanese Patent JP2623465
Kind Code:
B2
Inventors:
Hideki Yamazaki
Application Number:
JP7539388A
Publication Date:
June 25, 1997
Filing Date:
March 29, 1988
Export Citation:
Assignee:
Toshiba Mechatronics Co., Ltd.
International Classes:
H01L21/208; C30B15/00; C30B15/22; (IPC1-7): C30B15/00; C30B15/22; H01L21/208
Domestic Patent References:
| JP61222984A | ||||
| JP61222985A | ||||
| JP6424087A |
Attorney, Agent or Firm:
Hidekazu Miyoshi (1 outside)