Title:
【発明の名称】マイクロ波プラズマ処理装置
Document Type and Number:
Japanese Patent JP2623827
Kind Code:
B2
Inventors:
Seiji Samukawa
Application Number:
JP11823789A
Publication Date:
June 25, 1997
Filing Date:
May 11, 1989
Export Citation:
Assignee:
NEC
International Classes:
B01J19/08; C23C16/50; C23C16/511; C23F4/00; H01L21/205; H01L21/302; H01L21/3065; H01L21/31; (IPC1-7): C23C16/50; B01J19/08; C23F4/00; H01L21/205; H01L21/3065; H01L21/31
Domestic Patent References:
| JP2105413A | ||||
| JP1236629A |
Attorney, Agent or Firm:
Sugano Naka