Title:
【発明の名称】堆積膜製造装置
Document Type and Number:
Japanese Patent JP2641193
Kind Code:
B2
Abstract:
PURPOSE:To shorten the time for operation and to improve workability by forming the part of a reaction chamber where a by-product sticks into a cassette so that said part can be attached and detached at the time of forming a deposited film on a base body. CONSTITUTION:The cylindrical base body 2 to be formed with the deposited film is installed in the reaction chamber 1 and a cylindrical cassette 3 is attachably and detachably fixed to enclose the base body 2. The inside of the reaction chamber 1 is evacuated to a desired degree of vacuum and the base body 2 is heated to a prescribed temp. by a heater. A gaseous raw material is then introduced from an introducing part 8 into the reaction chamber. The gaseous raw material enters the inside of the reaction chamber 1 via an aperture 4 of the cassette 3 and at the same time, a high frequency is impressed to a high-frequency electrode 5 to generate plasma between said electrode and the base body 2. The deposited film is thereby formed on the surface of the base body 2 and at the same time, the by-product sticks on the inside surface of the cassette 3. The by-product is, therefore, removed extremely easily from the reaction chamber 1 simply by taking out the cassette 3 after the operation.
Inventors:
KUROKAWA TAKESHI
TSUEZUKI YOSHIO
TAKEI TETSUYA
IIDA SHIGEHIRA
TSUEZUKI YOSHIO
TAKEI TETSUYA
IIDA SHIGEHIRA
Application Number:
JP6087086A
Publication Date:
August 13, 1997
Filing Date:
March 20, 1986
Export Citation:
Assignee:
KYANON KK
International Classes:
H01L31/0248; C23C16/44; C23C16/46; C23C16/50; G03G5/08; H01L21/205; H01L31/08; (IPC1-7): C23C16/44; C23C16/50; G03G5/08; H01L21/205; H01L31/0248
Domestic Patent References:
| JP59143063A | ||||
| JP59100265A | ||||
| JP59217615A | ||||
| JP5989760A |
Attorney, Agent or Firm:
Yamashita