Title:
【発明の名称】電子銃
Document Type and Number:
Japanese Patent JP2650508
Kind Code:
B2
Abstract:
PURPOSE:To provide an electron gun with simple adjustment for filament location. CONSTITUTION:A filament holding frame 11 (i.e., filament 13) is moved in at least two directions on a plane by a moving means (motor 17, screw 16, and spring 15). Meantime the specimen current is sensed by a specimen ammeter 31. A control device 30 decides the filament position where the specimen current maximizes in all directions, and the holding frame 11 is moved to this position by the moving means.
Inventors:
NAKANISHI NORIAKI
Application Number:
JP9776791A
Publication Date:
September 03, 1997
Filing Date:
April 30, 1991
Export Citation:
Assignee:
SHIMAZU SEISAKUSHO KK
International Classes:
H01J37/04; H01J37/067; H01J37/15; H01J37/252; (IPC1-7): H01J37/067; H01J37/04; H01J37/252
Domestic Patent References:
| JP62143351A | ||||
| JP329249A |
Attorney, Agent or Firm:
Yoshiaki Nishioka