Title:
【発明の名称】位相差測定方法および装置
Document Type and Number:
Japanese Patent JP2655097
Kind Code:
B2
Inventors:
SEKI JUKO
Application Number:
JP24420494A
Publication Date:
September 17, 1997
Filing Date:
October 07, 1994
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
G01J9/02; G01M11/00; G03F1/30; G03F1/68; (IPC1-7): G01J9/02; G01M11/00
Domestic Patent References:
| JP5204134A | ||||
| JP61189502A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)