Title:
【発明の名称】ウェーハ外観検査装置
Document Type and Number:
Japanese Patent JP2655477
Kind Code:
B2
Inventors:
KINOSHITA TAKESHI
Application Number:
JP33061593A
Publication Date:
September 17, 1997
Filing Date:
December 27, 1993
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
H01L21/66; G01B11/24; G01N21/88; G01N21/956; (IPC1-7): H01L21/66; G01B11/24; G01N21/88; G03F1/08
Domestic Patent References:
| JP312543A | ||||
| JP3222343A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)