Title:
【発明の名称】形状測定装置及び形状測定方法
Document Type and Number:
Japanese Patent JP2661314
Kind Code:
B2
Abstract:
A configuration measuring apparatus includes a contacting member for contacting and tracing a surface of an object to be measured, a supporting member for supporting the contacting member and having a reflecting surface, an optical probe, a driving device, and an X-coordinate or XY-coordinate measuring device. The optical probe supports the contacting member through the supporting member and has an automatic focusing device for moving an objective lens in the Z-direction, which is an optical direction of the lens, so that a focusing point of the objective lens is positioned at the reflecting surface in spite of a possible dislocation of the reflecting surface, which is to be at a focusing position of the objective lens for condensing a laser beam and a device for measuring a Z-coordinate of the reflecting surface by allowing interference of the laser beam which has been reflected by the reflecting surface with a reference light. The driving device moves the optical probe in the X-direction or the XY-direction. The X-coordinate or XY-coordinate measuring device measures a position of the optical probe in the X-direction or the XY-direction. Then, the configuration of the surface of the object in XZ-coordinate or XYZ-coordinate is measured by the optical probe in cooperation with the contact member which traces the surface of the object.
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Inventors:
YOSHIZUMI KEIICHI
KUBO KEIJI
KUBO KEIJI
Application Number:
JP5533090A
Publication Date:
October 08, 1997
Filing Date:
March 07, 1990
Export Citation:
Assignee:
MATSUSHITA DENKI SANGYO KK
International Classes:
G01B11/24; G01B11/00; G01B11/245; (IPC1-7): G01B11/24
Domestic Patent References:
| JP62212507A | ||||
| JP1259210A | ||||
| JP629211A |
Attorney, Agent or Firm:
Tomoyuki Takimoto (1 person outside)