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Patent Searching and Data


Title:
【発明の名称】真空形成方法及び真空装置
Document Type and Number:
Japanese Patent JP2666710
Kind Code:
B2
Inventors:
Atsushi Yamashita
Application Number:
JP33028993A
Publication Date:
October 22, 1997
Filing Date:
December 27, 1993
Export Citation:
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Assignee:
NEC
International Classes:
B01J3/02; C23C16/50; C23F4/00; (IPC1-7): B01J3/02; C23C16/50; C23F4/00
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)