Title:
【発明の名称】高周波電流プローブ
Document Type and Number:
Japanese Patent JP2666746
Kind Code:
B2
Inventors:
Tsukoshi Tsuneo
Kenichi Hatakeyama
Koichiro Masuda
Kenichi Hatakeyama
Koichiro Masuda
Application Number:
JP29135294A
Publication Date:
October 22, 1997
Filing Date:
November 25, 1994
Export Citation:
Assignee:
NEC
International Classes:
G01R15/18; G01R1/22; G01R29/00; (IPC1-7): G01R29/00; G01R15/18
Attorney, Agent or Firm:
Takahashi Isamu