Title:
【発明の名称】排ガス処理方法
Document Type and Number:
Japanese Patent JP2668795
Kind Code:
B2
Abstract:
PURPOSE:To treat ozone, nitrogen oxide, hydrogen fluoride, etc., which generate due to processing by irradiation by treating exhaust gas generated at a radiation projecting equipment in a two-stage treatment system, of which the first stage washes the exhaust gas in a wet state and the second stage adsorbs and decomposes it in a dry state. CONSTITUTION:Gas discharged from radiation projecting equipment using electron ray is treated by a washing tower 20 which washes the gas with an alkali solution such as an aqueous sodium hydroxide in a wet state. At the tower 20, mainly hydrogen fluoride and nitrogen pentoxide are removed. The exhaust gas discharged from the washing tower 20 is introduced in an activated charcoal adsorption tower 40, where mainly the ozone is removed by dry adsorption decomposition. Then the treated exhaust gas is released to the atmosphere from a smoke stack 60 through a damper 51, an exhaust fan for the exhaust gas and a damper 52. At that time, the temperature of the exhaust gas whose humidity is increased by the washing tower 20, is increased by an exhaust gas heater 30 provided in an intermediate flow path. Thus the condensation of moisture in the activated charcoal of the activated charcoal adsorption tower 40 is prevented.
Inventors:
Seiichi Wada
Masakazu Ishihara
Masakazu Ishihara
Application Number:
JP12626088A
Publication Date:
October 27, 1997
Filing Date:
May 24, 1988
Export Citation:
Assignee:
Mitsubishi Kakoki Co., Ltd.
Rajie Industry Co., Ltd.
Rajie Industry Co., Ltd.
International Classes:
B01D53/34; B01D53/04; B01D53/56; B01D53/66; B01D53/68; B01D53/77; B01D53/81; (IPC1-7): B01D53/66; B01D53/04; B01D53/56; B01D53/68; B01D53/81
Domestic Patent References:
| JP50124873A |
Attorney, Agent or Firm:
Shirai Shigetaka