Title:
【発明の名称】有機薄膜の製造装置
Document Type and Number:
Japanese Patent JP2677587
Kind Code:
B2
Abstract:
PURPOSE:To form a uniform and clean org. film in a vessel by providing an operating wall which is fixed at both ends and is expandable and contractable to a vessel sliding surface and compressing means. CONSTITUTION:The operating wall shrinks as the compressing means moves to compress the monomolecular film on a water surface developed in the vessel. The molecules existing near the side wall are thereby moved in the compressing direction even if said molecules have high viscoelasticity. Although the monomolecular film on the water surface hardly moves in the position apart from the compressing means, the operating wall does not substantially move either. Since the operating wall which serves as the side wall moves at nearly the same distance as the distance at which the compressing means on the water surface moves, the film is compressed uniformly over the entire part of the vessel A and the clean and defect-free LB film (Langmuir-Blodgett's film) is accumulated.
Inventors:
Yumiko Shike
Toshio Nakayama
Akira Miura
Toshio Nakayama
Akira Miura
Application Number:
JP4063888A
Publication Date:
November 17, 1997
Filing Date:
February 25, 1988
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
B05C3/02; B05C3/09; H01L21/368; H01L51/00; H01L51/05; H01L51/40; (IPC1-7): B05C3/09; H01L21/368; H01L51/00
Domestic Patent References:
| JPS63236563A | ||||
| JPS62180771A | ||||
| JP59171781B |
Attorney, Agent or Firm:
Hideaki Tokawa (1 outside)