Title:
【発明の名称】半導体選択成長方法
Document Type and Number:
Japanese Patent JP2685146
Kind Code:
B2
Inventors:
Kenichi Koike
Application Number:
JP5557488A
Publication Date:
December 03, 1997
Filing Date:
March 09, 1988
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/205; H01L27/15; H01S5/00; H01S5/026; (IPC1-7): H01S3/18; H01L21/205; H01L27/15
Domestic Patent References:
| JP63236313A | ||||
| JP1170043A |
Attorney, Agent or Firm:
Yoshiki Hasegawa (3 outside)