Title:
【発明の名称】ICハンドラの冷却装置
Document Type and Number:
Japanese Patent JP2687767
Kind Code:
B2
Abstract:
PURPOSE:To cool an entire constant-temperature tank substantially uniformly and to strictly manage its temperature by supplying refrigerant such as liquid nitrogen, etc., into the tank. CONSTITUTION:A refrigerant supply member 22 is composed of double tubes, an outer tube is a slightly shorter than the width of a duct 20, and both ends are closed. An inner tube is inserted through the outer tube, and the base end is connected to a refrigerant supply source. The inner tube is formed therein with a refrigerant input chamber 28, a part between the inner and outer tubes becomes a refrigerant storage chamber 29. A plurality of refrigerant passages 30 are provided at the inner tube, and a plurality of refrigerant injection ports 31 are provided at the outer tube. The quantity of the refrigerant to be injected from the ports 31 are freely controlled by independently rotating and axially sliding the inner and outer tubes and directing the ports 31 in an arbitrary direction.
Inventors:
Yoshino Kengo
Suzuki Tetsuya
Suzuki Tetsuya
Application Number:
JP17479891A
Publication Date:
December 08, 1997
Filing Date:
June 20, 1991
Export Citation:
Assignee:
Hitachi Electronics Engineering Co., Ltd.
International Classes:
G01R31/26; H01L21/66; F25D3/10; (IPC1-7): H01L21/66; F25D3/10; G01R31/26
Domestic Patent References:
| JP61132738A | ||||
| JP63133038A | ||||
| JP62201080U | ||||
| JP1180674U | ||||
| JP4022858Y1 |
Attorney, Agent or Firm:
Shunji Kagei