Title:
【発明の名称】ドライエッチング方法
Document Type and Number:
Japanese Patent JP2687769
Kind Code:
B2
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Inventors:
Tetsuji Nagayama
Application Number:
JP19362191A
Publication Date:
December 08, 1997
Filing Date:
July 09, 1991
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065
Domestic Patent References:
| JP484427A | ||||
| JP4243129A | ||||
| JP61179540A |
Attorney, Agent or Firm:
Akira Koike (3 others)