Title:
【発明の名称】単結晶薄膜形成方法
Document Type and Number:
Japanese Patent JP2699608
Kind Code:
B2
Inventors:
Akio Tanigawa
Application Number:
JP9452890A
Publication Date:
January 19, 1998
Filing Date:
April 10, 1990
Export Citation:
Assignee:
NEC
International Classes:
H01L21/203; H01L21/285; (IPC1-7): H01L21/285; H01L21/203
Domestic Patent References:
| JP60158615A | ||||
| JP63233524A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)