Title:
【発明の名称】荷電粒子ビーム描画方法
Document Type and Number:
Japanese Patent JP2708551
Kind Code:
B2
Inventors:
Takemura etc.
Komagata Tadashi
Komagata Tadashi
Application Number:
JP14253989A
Publication Date:
February 04, 1998
Filing Date:
June 05, 1989
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01L21/30; H01L21/027; (IPC1-7): H01L21/027
Domestic Patent References:
| JP63248129A | ||||
| JP62285418A |