Title:
【発明の名称】レジスト膜の処理方法
Document Type and Number:
Japanese Patent JP2731752
Kind Code:
B2
Inventors:
YAMAMOTO TSUTOMU
Application Number:
JP18135595A
Publication Date:
March 25, 1998
Filing Date:
July 18, 1995
Export Citation:
Assignee:
YAMAGATA NIPPON DENKI KK
International Classes:
G03F7/16; G03F7/38; H01L21/027; (IPC1-7): G03F7/16; G03F7/38; H01L21/027
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)