Title:
【発明の名称】イオン生成方法およびイオン生成装置
Document Type and Number:
Japanese Patent JP2733629
Kind Code:
B2
More Like This:
| JPS58197646 | METHOD OF IONIZATION |
| JP2010156047 | CONTROL OF FLOW OF VAPORS SUBLIMATED FROM SOLIDS |
| JP2020161241 | ION SOURCE |
Inventors:
MATSUDO MASAHIKO
Application Number:
JP5886890A
Publication Date:
March 30, 1998
Filing Date:
March 09, 1990
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
H01J27/20; H01J37/08; H01J37/317; H01L21/265; (IPC1-7): H01J27/20; H01J37/08; H01J37/317; H01L21/265
Domestic Patent References:
| JP61290629A | ||||
| JP52150688A |
Attorney, Agent or Firm:
Saichi Suyama (1 person outside)