Title:
【発明の名称】プラズマ気相成長方法
Document Type and Number:
Japanese Patent JP2734021
Kind Code:
B2
Inventors:
INOE SHUICHI
Application Number:
JP28270988A
Publication Date:
March 30, 1998
Filing Date:
November 08, 1988
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
C23C16/50; C23C16/52; H01L21/205; H01L21/31; (IPC1-7): C23C16/50; C23C16/52; H01L21/205; H01L21/31
Domestic Patent References:
JP2130924A | ||||
JP1252782A | ||||
JP592132U |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)