Title:
【発明の名称】表面形状測定用光学装置
Document Type and Number:
Japanese Patent JP2734221
Kind Code:
B2
Inventors:
ISHIHARA MITSUHIRO
Application Number:
JP7202091A
Publication Date:
March 30, 1998
Filing Date:
March 13, 1991
Export Citation:
Assignee:
TAKAOKA SEISAKUSHO KK
International Classes:
G01B11/24; (IPC1-7): G01B11/24
Domestic Patent References:
| JP6117006A |