Title:
【発明の名称】動圧空気軸受装置およびその動圧発生用溝の作製方法
Document Type and Number:
Japanese Patent JP2746830
Kind Code:
B2
More Like This:
Inventors:
SUZUKI MITSUO
ITAMI YUKIO
IKEDA KUNIO
KUDO YUZURU
ABE TAKAO
TAKAHASHI YOSHIHIRO
ITAMI YUKIO
IKEDA KUNIO
KUDO YUZURU
ABE TAKAO
TAKAHASHI YOSHIHIRO
Application Number:
JP6427494A
Publication Date:
May 06, 1998
Filing Date:
April 01, 1994
Export Citation:
Assignee:
RIKOO KK
TOHOKU RIKOO KK
TOHOKU RIKOO KK
International Classes:
C23C18/31; C23C18/52; F16C17/02; F16C33/12; G02B26/10; G02B26/12; (IPC1-7): F16C17/02; C23C18/31; C23C18/52; F16C33/12; G02B26/10
Domestic Patent References:
| JP587124A | ||||
| JP666316A |
Attorney, Agent or Firm:
Ariga Gunichiro