Title:
【発明の名称】イオンビーム装置
Document Type and Number:
Japanese Patent JP2759949
Kind Code:
B2
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Inventors:
KONISHI MORIKAZU
TAKIZAWA MASAAKI
TAKIZAWA MASAAKI
Application Number:
JP31288487A
Publication Date:
May 28, 1998
Filing Date:
December 10, 1987
Export Citation:
Assignee:
SONII KK
International Classes:
H01J27/26; H01J37/08; (IPC1-7): H01J27/26; H01J37/08
Domestic Patent References:
| JP6297242A | ||||
| JP584252A |
Attorney, Agent or Firm:
Hidekuma Matsukuma