Title:
【発明の名称】反射電子線回折装置
Document Type and Number:
Japanese Patent JP2764599
Kind Code:
B2
More Like This:
| JPS573358 | DETECTOR FOR ELECTRON BEAM DEVICE |
Inventors:
MIKOSHIBA NOBUO
OOMI TADAHIRO
TSUBOCHI KAZUO
EKI KAZUYA
OOMI TADAHIRO
TSUBOCHI KAZUO
EKI KAZUYA
Application Number:
JP3714389A
Publication Date:
June 11, 1998
Filing Date:
February 16, 1989
Export Citation:
Assignee:
MIKOSHIBA NOBUO
OOMI TADAHIRO
TSUBOCHI KAZUO
EKI KAZUYA
OOMI TADAHIRO
TSUBOCHI KAZUO
EKI KAZUYA
International Classes:
G01N23/225; G01N23/20; G01N23/201; H01J37/295; (IPC1-7): G01N23/20; G01N23/201
Domestic Patent References:
| JP5359486A | ||||
| JP61151449A |
Attorney, Agent or Firm:
Prefecture Kosuke